One-dimensional surface profile measurement by detection of reflecting direction of a scanned laser beam

Osami Sasaki; Ryo Shinozaki; Takamasa Suzuki

doi:10.1117/12.2020983

22 June 2013 One-dimensional surface profile measurement by detection of reflecting direction of a scanned laser beam

Osami Sasaki, Ryo Shinozaki, Takamasa Suzuki

Proceedings Volume 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013); 876919 (2013) https://doi.org/10.1117/12.2020983
Event: International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 2013, Singapore, Singapore

Abstract

A laser beam is scanned on an object surface with a fast scanning system which consists of a rotating mirror, a flat mirror, and a concave spherical mirror. Propagation direction of the laser beam reflected by a sample surface is detected with a lens and a position sensitive detector. A one-dimensional surface profile of the sample surface is measured by integrating a slop distribution obtained from the propagation direction of the reflected beam. The measurement is insensitivity to mechanical vibrations because of a high-speed scanning of a few milliseconds. The required positioning accuracy of the sample surface is lower than a few millimeters. The measurement repeatability is less than 10 nm.

Citation Download Citation

Osami Sasaki, Ryo Shinozaki, and Takamasa Suzuki "One-dimensional surface profile measurement by detection of reflecting direction of a scanned laser beam", Proc. SPIE 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013), 876919 (22 June 2013); https://doi.org/10.1117/12.2020983

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KEYWORDS

Mirrors

Curium

Phase modulation

Sensors

Inspection

Scanners

Laser beam propagation

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