Reliable 6 PEP LTPS device for AMOLED's

Cheng-Wei Chou; Pei-Yun Wang; Chin-Wei Hu; York Chang; Ching-Sang Chuang; Yusin Lin

doi:10.1117/12.2027031

27 September 2013 Reliable 6 PEP LTPS device for AMOLED's

Cheng-Wei Chou, Pei-Yun Wang, Chin-Wei Hu, York Chang, Ching-Sang Chuang, Yusin Lin

Proceedings Volume 8829, Organic Light Emitting Materials and Devices XVII; 88290S (2013) https://doi.org/10.1117/12.2027031
Event: SPIE Organic Photonics + Electronics, 2013, San Diego, California, United States

Abstract

This study presents a TFT structure which has less photo process and higher cost competitiveness in AMOLED display markets. A novel LTPS based 6 masks TFT structure for bottom emission AMOLED display is demonstrated in this paper. High field effect mobility (PMOS < 80 cm²/Vs ) and high reliability (PBTS △Vth< 0.02V @ 50oC VG=15V 10ks) was accomplished without the high temperature and rapid thermal annealing (RTA) activation process. Furthermore, a 14-inch AMOLED TV was achieved on the proposed 6-pep TFT backplane using the Gen. 3.5 mass production factory.

Citation Download Citation

Cheng-Wei Chou, Pei-Yun Wang, Chin-Wei Hu, York Chang, Ching-Sang Chuang, and Yusin Lin "Reliable 6 PEP LTPS device for AMOLED's", Proc. SPIE 8829, Organic Light Emitting Materials and Devices XVII, 88290S (27 September 2013); https://doi.org/10.1117/12.2027031

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