Optimization of LaN/B multilayer mirrors for 6.x nm wavelength

I. A. Makhotkin; R. W. E. van de Kruijs; E. Zoethout; E. Louis; F. Bijkerk

doi:10.1117/12.2024199

27 September 2013 Optimization of LaN/B multilayer mirrors for 6.x nm wavelength

I. A. Makhotkin, R. W. E. van de Kruijs, E. Zoethout, E. Louis, F. Bijkerk

Proceedings Volume 8848, Advances in X-Ray/EUV Optics and Components VIII; 88480O (2013) https://doi.org/10.1117/12.2024199
Event: SPIE Optical Engineering + Applications, 2013, San Diego, California, United States

Abstract

In this article we present an overview of the optimization of LaN/B multilayers that enabled the deposition of a multilayer with a normal incidence reflectance of 57.3 % at 6.6 nm wavelength, the highest value reported to date. Two different ways of nitridation of the La layers were investigated: firstly N-ion post treatment of the La layer and secondly reactive magnetron sputtering of La in N₂ atmosphere. Initially the optimization of the multilayers was performed for 50 period test multilayers, followed by the selection of the best process to study the stability of the full stack deposition and the optical performance of the mirrors. The scaling of reflectivity with increasing number of periods for LaN/B multilayer mirrors will also be discussed.

Citation Download Citation

I. A. Makhotkin, R. W. E. van de Kruijs, E. Zoethout, E. Louis, and F. Bijkerk "Optimization of LaN/B multilayer mirrors for 6.x nm wavelength", Proc. SPIE 8848, Advances in X-Ray/EUV Optics and Components VIII, 88480O (27 September 2013); https://doi.org/10.1117/12.2024199

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available