Model-based etch profile simulation of PSM films

Michael Grimbergen; Madhavi Chandrachood; Jeffrey Tran; Becky Leung; Keven Yu; Amitabh Sabharwal; Ajay Kumar

doi:10.1117/12.2029006

1 October 2013 Model-based etch profile simulation of PSM films

Michael Grimbergen, Madhavi Chandrachood, Jeffrey Tran, Becky Leung, Keven Yu, Amitabh Sabharwal, Ajay Kumar

Proceedings Volume 8880, Photomask Technology 2013; 88800X (2013) https://doi.org/10.1117/12.2029006
Event: SPIE Photomask Technology, 2013, Monterey, California, United States

Abstract

For advanced binary and PSM mask etch, final profile control is critically important for achieving desired mask specifications. As an aid to attain profile control, an etch profile simulation method has been developed. The method starts with an initial photoresist profile and incorporates etch rate and directionality information to predict the final etch profile. In this paper, simulated results are compared to measured etch profiles for PSM substrates. The results highlight the importance and implications of incoming resist profile and etch selectivity on final profile.

Citation Download Citation

Michael Grimbergen, Madhavi Chandrachood, Jeffrey Tran, Becky Leung, Keven Yu, Amitabh Sabharwal, and Ajay Kumar "Model-based etch profile simulation of PSM films", Proc. SPIE 8880, Photomask Technology 2013, 88800X (1 October 2013); https://doi.org/10.1117/12.2029006

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available