Nanoimprint lithography for microfluidics manufacturing

Gerald Kreindl; Thorsten Matthias

doi:10.1117/12.2035609

20 December 2013 Nanoimprint lithography for microfluidics manufacturing

Gerald Kreindl, Thorsten Matthias

Proceedings Volume 8923, Micro/Nano Materials, Devices, and Systems; 892330 (2013) https://doi.org/10.1117/12.2035609
Event: SPIE Micro+Nano Materials, Devices, and Applications, 2013, Melbourne, Victoria, Australia

Abstract

The history of imprint technology as lithography method for pattern replication can be traced back to 1970’s but the most significant progress has been made by the research group of S. Chou in the 1990’s. Since then, it has become a popular technique with a rapidly growing interest from both research and industrial sides and a variety of new approaches have been proposed along the mainstream scientific advances. Nanoimprint lithography (NIL) is a novel method for the fabrication of micro/nanometer scale patterns with low cost, high throughput and high resolution. Unlike traditional optical lithographic approaches, which create pattern through the use of photons or electrons to modify the chemical and physical properties of the resist, NIL relies on direct mechanical deformation of the resist and can therefore achieve resolutions beyond the limitations set by light diffraction or beam scattering that are encountered in conventional lithographic techniques. The ability to fabricate structures from the micro- to the nanoscale with high precision in a wide variety of materials is of crucial importance to the advancement of micro- and nanotechnology and the biotech- sciences as a whole and will be discussed in this paper. Nanoimprinting can not only create resist patterns, as in lithography, but can also imprint functional device structures in various polymers, which can lead to a wide range of applications in electronics, photonics, data storage, and biotechnology.

Citation Download Citation

Gerald Kreindl and Thorsten Matthias "Nanoimprint lithography for microfluidics manufacturing", Proc. SPIE 8923, Micro/Nano Materials, Devices, and Systems, 892330 (20 December 2013); https://doi.org/10.1117/12.2035609

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available