Design and fabrication of micro-bolometer array with double layers structure

Jun Wang; Jun Gou; Weizhi Li; Deen Gu; Yadong Jiang

doi:10.1117/12.2037899

21 December 2013 Design and fabrication of micro-bolometer array with double layers structure

Jun Wang, Jun Gou, Weizhi Li, Deen Gu, Yadong Jiang

Proceedings Volume 9047, 2013 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication; 90470I (2013) https://doi.org/10.1117/12.2037899
Event: International Conference on Optical Instruments and Technology (OIT2013), 2013, Beijing, China

Abstract

In order to increase the fill factor of small size micro-bolometer, double layer micro-bolometer was designed in this paper with bottom sensitive/ top absorber structure. The deformation and residual stress characters of single layer and double layer structure models were simulated and optimized, and with the optimized results, double layer structure micro-bolometer was fabricated with multifarious semiconductor recipes. The surface image and deformation information of the fabricated micro-bolometer was tested. By using double layer structure, the area of membrane increases by a factor of 1.99 and 3.6 for the “L” shape leg structure and long “S” shape structure, respectively.

Citation Download Citation

Jun Wang, Jun Gou, Weizhi Li, Deen Gu, and Yadong Jiang "Design and fabrication of micro-bolometer array with double layers structure", Proc. SPIE 9047, 2013 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication, 90470I (21 December 2013); https://doi.org/10.1117/12.2037899

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