Novel EUV resist materials for 16nm half pitch and EUV resist defects

Motohiro Shiratani; Takehiko Naruoka; Ken Maruyama; Ramakrishnan Ayothi; Yoshi Hishiro; Kenji Hoshiko; Andreia Santos; Xavier Buch; Tooru Kimura

doi:10.1117/12.2046133

17 April 2014 Novel EUV resist materials for 16nm half pitch and EUV resist defects

Motohiro Shiratani, Takehiko Naruoka, Ken Maruyama, Ramakrishnan Ayothi, Yoshi Hishiro, Kenji Hoshiko, Andreia Santos, Xavier Buch, Tooru Kimura

Author Affiliations +

Proceedings Volume 9048, Extreme Ultraviolet (EUV) Lithography V; 90481D (2014) https://doi.org/10.1117/12.2046133
Event: SPIE Advanced Lithography, 2014, San Jose, California, United States

Abstract

Extreme ultraviolet (EUV) lithography is a candidate for the manufacturing of semiconductor devices at the 22 nm half pitch node and below. EUV lithography requires high performance resist with limited outgassing property. The key challenge for EUV resist is the simultaneous requirement of ultrahigh resolution (R), low line edge roughness (L) and high sensitivity (S) for lines and spaces (LS) features. To achieve high resist sensitivity EUV resist absorbance should be increased. Resin containing fluorine atom is one of the most attractive methods to improve absorbance level of EUV resist because the fluorine atom absorbs EUV light strongly. However, resist hydrophobicity (or high contact angle) also increase due to presence of fluorine atoms in the resist polymer. It is difficult to rinse high CA resist during development process so the resist containing polymer with fluorine atom may produce additional defects. In this paper, we will report the relationship between line edge roughness and acid diffusion length. We will also show the method to diminish defects caused by high contact angle (CA) resist. We achieved good resolution and LER improvement by controlling acid diffusion length. Moreover, we found the relationship of the number of defects and the structure of the monomers containing fluorine units.

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Motohiro Shiratani, Takehiko Naruoka, Ken Maruyama, Ramakrishnan Ayothi, Yoshi Hishiro, Kenji Hoshiko, Andreia Santos, Xavier Buch, and Tooru Kimura "Novel EUV resist materials for 16nm half pitch and EUV resist defects", Proc. SPIE 9048, Extreme Ultraviolet (EUV) Lithography V, 90481D (17 April 2014); https://doi.org/10.1117/12.2046133

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