Extending the scope of poly(styrene)-block-poly(methyl methacrylate) for directed self-assembly

Thomas Bennett; Kevin Pei; Han-Hao Cheng; Kristofer J. Thurecht; Kevin S. Jack; Idriss Blakey

doi:10.1117/12.2046296

28 March 2014 Extending the scope of poly(styrene)-block-poly(methyl methacrylate) for directed self-assembly

Thomas Bennett, Kevin Pei, Han-Hao Cheng, Kristofer J. Thurecht, Kevin S. Jack, Idriss Blakey

Proceedings Volume 9049, Alternative Lithographic Technologies VI; 90490R (2014) https://doi.org/10.1117/12.2046296
Event: SPIE Advanced Lithography, 2014, San Jose, California, United States

Abstract

Directed self-assembly (DSA) is a promising technique for extending conventional lithographic techniques by being able to print features with critical dimensions under 10 nm. The most widely studied block copolymer system is polystyreneblock- polymethyl methacrylate (PS-b-PMMA). The system is well understood in terms of its synthesis, properties and performance in DSA. However, PS-b-PMMA also has a number of limitations that impact on its performance and hence scope of application. The primary limitation is the low Flory-Huggins polymer-polymer interaction parameter (χ), which limits the size of features that can be printed by DSA. Another issue with block copolymers in general is that specific molecular weights need to be synthesized to achieve desired morphologies and feature sizes. We are exploring blending ionic liquid additiveswithPS-b-PMMAto increase the χ parameter. This allows smaller feature sizes to be accessed by PS-b-PMMA. Depending on the amount of additive it is also possible to tune the domain size and the morphology of the systems. These findings may expand the scope of PS-b-PMMA for DSA.

Citation Download Citation

Thomas Bennett, Kevin Pei, Han-Hao Cheng, Kristofer J. Thurecht, Kevin S. Jack, and Idriss Blakey "Extending the scope of poly(styrene)-block-poly(methyl methacrylate) for directed self-assembly", Proc. SPIE 9049, Alternative Lithographic Technologies VI, 90490R (28 March 2014); https://doi.org/10.1117/12.2046296

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available