Self-aligned quadruple patterning-aware routing

Fumiharu Nakajima; Chikaaki Kodama; Hirotaka Ichikawa; Koichi Nakayama; Shigeki Nojima; Toshiya Kotani

doi:10.1117/12.2046241

28 March 2014 Self-aligned quadruple patterning-aware routing

Fumiharu Nakajima, Chikaaki Kodama, Hirotaka Ichikawa, Koichi Nakayama, Shigeki Nojima, Toshiya Kotani

Proceedings Volume 9053, Design-Process-Technology Co-optimization for Manufacturability VIII; 90530C (2014) https://doi.org/10.1117/12.2046241
Event: SPIE Advanced Lithography, 2014, San Jose, California, United States

Abstract

Self-Aligned Quadruple Patterning (SAQP) is one of the most leading techniques in 14 nm node and beyond. However, the construction of feasible layout configurations must follow stricter constraints than in LELELE triple patterning process. Some SAQP layout decomposition methods were recently proposed. However, due to strict constraints required for feasible SAQP layout, the decomposition strategy considering an arbitrary layout does not seem realistic. In this paper, we propose a new routing method for feasible SAQP layout requiring no decomposition. Our method performs detailed routing by correct-by-construction approach and offers compliant layout configuration without any pitch conflict.

Citation Download Citation

Fumiharu Nakajima, Chikaaki Kodama, Hirotaka Ichikawa, Koichi Nakayama, Shigeki Nojima, and Toshiya Kotani "Self-aligned quadruple patterning-aware routing", Proc. SPIE 9053, Design-Process-Technology Co-optimization for Manufacturability VIII, 90530C (28 March 2014); https://doi.org/10.1117/12.2046241

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