ECO fill: automated fill modification to support late-stage design changes

Greg Davis; Jeff Wilson; J. J. Yu; Anderson Chiu; Yao-Jen Chuang; Ricky Yang

doi:10.1117/12.2047650

28 March 2014 ECO fill: automated fill modification to support late-stage design changes

Greg Davis, Jeff Wilson, J. J. Yu, Anderson Chiu, Yao-Jen Chuang, Ricky Yang

Proceedings Volume 9053, Design-Process-Technology Co-optimization for Manufacturability VIII; 90530S (2014) https://doi.org/10.1117/12.2047650
Event: SPIE Advanced Lithography, 2014, San Jose, California, United States

Abstract

One of the most critical factors in achieving a positive return for a design is ensuring the design not only meets performance specifications, but also produces sufficient yield to meet the market demand. The goal of design for manufacturability (DFM) technology is to enable designers to address manufacturing requirements during the design process. While new cell-based, DP-aware, and net-aware fill technologies have emerged to provide the designer with automated fill engines that support these new fill requirements, design changes that arrive late in the tapeout process (as engineering change orders, or ECOs) can have a disproportionate effect on tapeout schedules, due to the complexity of replacing fill. If not handled effectively, the impacts on file size, run time, and timing closure can significantly extend the tapeout process. In this paper, the authors examine changes to design flow methodology, supported by new fill technology, that enable efficient, fast, and accurate adjustments to metal fill late in the design process. We present an ECO fill methodology coupled with the support of advanced fill tools that can quickly locate the portion of the design affected by the change, remove and replace only the fill in that area, while maintaining the fill hierarchy. This new fill approach effectively reduces run time, contains fill file size, minimizes timing impact, and minimizes mask costs due to ECO-driven fill changes, all of which are critical factors to ensuring time-to-market schedules are maintained.

Citation Download Citation

Greg Davis, Jeff Wilson, J. J. Yu, Anderson Chiu, Yao-Jen Chuang, and Ricky Yang "ECO fill: automated fill modification to support late-stage design changes", Proc. SPIE 9053, Design-Process-Technology Co-optimization for Manufacturability VIII, 90530S (28 March 2014); https://doi.org/10.1117/12.2047650

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
7 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Databases

Metals

Design for manufacturability

Design for manufacturing

Manufacturing

Photomasks

Back end of line

Show All Keywords

Keywords/Phrases

Search In:

Publication Years