Advanced defect and metrology solutions

Erik Novak

doi:10.1117/12.2052934

28 May 2014 Advanced defect and metrology solutions

Erik Novak

Proceedings Volume 9110, Dimensional Optical Metrology and Inspection for Practical Applications III; 91100G (2014) https://doi.org/10.1117/12.2052934
Event: SPIE Sensing Technology + Applications, 2014, Baltimore, MD, United States

Abstract

Cost, weight, performance, and lifetime requirements for precision components used throughout the aerospace and defense industries are driving innovative mechanical designs, manufacturing processes and use of new materials. In turn, these advanced components typically require tighter dimensional and surface tolerances to function as designed. Scratch testers, microscope-based systems, and other traditional metrology systems are inadequate for roughness, small-scale geometry, and defect determination on many of these parts. This talk will examine the advantages and disadvantages of some of the new technologies developed to provide more robust, versatile, and sensitive measurements of precision components for advanced manufacturing environments.

Citation Download Citation

Erik Novak "Advanced defect and metrology solutions", Proc. SPIE 9110, Dimensional Optical Metrology and Inspection for Practical Applications III, 91100G (28 May 2014); https://doi.org/10.1117/12.2052934

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