A novel reciprocating micropump based on Lorentz force

Alinaghi Salari; Abbas Hakimsima; Mohammad Behshad Shafii

doi:10.1117/12.2078611

5 March 2015 A novel reciprocating micropump based on Lorentz force

Alinaghi Salari, Abbas Hakimsima, Mohammad Behshad Shafii

Proceedings Volume 9320, Microfluidics, BioMEMS, and Medical Microsystems XIII; 93200C (2015) https://doi.org/10.1117/12.2078611
Event: SPIE BiOS, 2015, San Francisco, California, United States

Abstract

Lorentz force is the pumping basis of many electromagnetic micropumps used in lab-on-a-chip. In this paper a novel reciprocating single-chamber micropump is proposed, in which the actuation technique is based on Lorentz force acting on an array of microwires attached on a membrane surface. An alternating current is applied through the microwires in the presence of a magnetic field. The resultant force causes the membrane to oscillate and pushes the fluid to flow through microchannel using a ball-valve. The pump chamber (3 mm depth) was fabricated on a Polymethylmethacrylate (PMMA) substrate using laser engraving technique. The chamber was covered by a 60 μm thick hyper-elastic latex rubber diaphragm. Two miniature permanent magnets capable of providing magnetic field of 0.09 T at the center of the diaphragm were mounted on each side of the chamber. Square wave electric current with low-frequencies was generated using a function generator. Cylindrical copper microwires (250 μm diameter and 5 mm length) were attached side-by-side on top surface of the diaphragm. Thin loosely attached wires were used as connectors to energize the electrodes. Due to large displacement length of the diaphragm (~3 mm) a high efficiency (~90%) ball valve (2 mm diameter stainless steel ball in a tapered tubing structure) was used in the pump outlet. The micropump exhibits a flow rate as high as 490 μl/s and pressure up to 1.5 kPa showing that the pump is categorized among high-flow-rate mechanical micropumps.

Citation Download Citation

Alinaghi Salari, Abbas Hakimsima, and Mohammad Behshad Shafii "A novel reciprocating micropump based on Lorentz force", Proc. SPIE 9320, Microfluidics, BioMEMS, and Medical Microsystems XIII, 93200C (5 March 2015); https://doi.org/10.1117/12.2078611

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KEYWORDS

Magnetism

Microfluidics

Polymethylmethacrylate

Connectors

Electromagnetism

Fabrication

Lab on a chip

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