Suspended silicon slotted microring resonators with ultra-high optical quality

Wei C. Jiang; Qiang Lin

doi:10.1117/12.2079307

27 February 2015 Suspended silicon slotted microring resonators with ultra-high optical quality

Wei C. Jiang, Qiang Lin

Proceedings Volume 9367, Silicon Photonics X; 936708 (2015) https://doi.org/10.1117/12.2079307
Event: SPIE OPTO, 2015, San Francisco, California, United States

Abstract

We propose and demonstrate a unique suspended slot-waveguide structure supported by a thin slab to realize high-quality air-clad silicon slotted microring resonators (SMRs) on the silicon-on-insulator platform, based on a fabrication process consisting of two-step electron beam lithography and inductively-coupled-plasma reactive-ion- etching. Our SMRs can achieve an intrinsic optical quality factor (Q) above 10⁵ operating at the telecom band, which is the highest value for silicon SMRs reported to date. The demonstrated high-quality air-clad silicon SMRs enable great potential for broad applications in biosensing, nonlinear photonics, and cavity optomechanics.

Citation Download Citation

Wei C. Jiang and Qiang Lin "Suspended silicon slotted microring resonators with ultra-high optical quality", Proc. SPIE 9367, Silicon Photonics X, 936708 (27 February 2015); https://doi.org/10.1117/12.2079307

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