Large MOEMS diffraction grating results providing an EC-QCL wavelength scan of 20%

Jan Grahmann; André Merten; Andreas Herrmann; Ralf Ostendorf; Daniela Bleh; Christian Drabe; Jörg Kamenz

doi:10.1117/12.2079640

27 February 2015 Large MOEMS diffraction grating results providing an EC-QCL wavelength scan of 20%

Jan Grahmann, André Merten, Andreas Herrmann, Ralf Ostendorf, Daniela Bleh, Christian Drabe, Jörg Kamenz

Proceedings Volume 9375, MOEMS and Miniaturized Systems XIV; 93750W (2015) https://doi.org/10.1117/12.2079640
Event: SPIE OPTO, 2015, San Francisco, California, United States

Abstract

Experimental results of a large scanning grating with a diameter of 5mm and 1 kHz scan frequency are discussed. An optical diffraction grating is fabricated on a mirror single crystal silicon plate to scan the first diffraction order in the MIR-wavelength range over a quantum cascade laser facet. Special emphasis is on the development of the grating technology module to integrate it with high accuracy and reproducibility into the IPMS AME75 process flow. The principle EC-QCL setup with the scanning grating is described and first measurement results concerning laser output power and tuning range are presented.

Citation Download Citation

Jan Grahmann, André Merten, Andreas Herrmann, Ralf Ostendorf, Daniela Bleh, Christian Drabe, and Jörg Kamenz "Large MOEMS diffraction grating results providing an EC-QCL wavelength scan of 20%", Proc. SPIE 9375, MOEMS and Miniaturized Systems XIV, 93750W (27 February 2015); https://doi.org/10.1117/12.2079640

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