Design and simulation of a MEM pressure microgripper based on electrothermal microactuators

Margarita Tecpoyotl-T.; Pedro Vargas Ch.; Svetlana Koshevaya; Ramón Cabello-R.; Alejandra Ocampo-D.; J. Gerardo Vera-D.

doi:10.1117/12.2237533

23 September 2016 Design and simulation of a MEM pressure microgripper based on electrothermal microactuators

Margarita Tecpoyotl-T., Pedro Vargas Ch., Svetlana Koshevaya, Ramón Cabello-R., Alejandra Ocampo-D., J. Gerardo Vera-D.

Proceedings Volume 9936, Thin Films for Solar and Energy Technology VIII; 99360I (2016) https://doi.org/10.1117/12.2237533
Event: SPIE Optics + Photonics for Sustainable Energy, 2016, San Diego, California, United States

Abstract

Design and simulation of a novel pressure microgripper based on Microelectromechanical, MEM technology, and composed by several electrothermal microactuators were carried out in order to increment the displacement and the cutoff force. The implementation of an element of press or gripping in the arrow of chevron actuator was implemented to supply stability in the manipulation of micro-objects. Each device of the microgripper and its fundamental equations will be described. The fundamental parameters to understand the operation and behaviour of the device are analyzed through sweeps of temperature (from 30 °C up to 100 °C) and voltage (from 0.25 V up to 5 V), showing the feasibility to operate the microgripper with electrical or thermal feeding. The design and simulation were development with Finite Element Method (FEM) in Ansys-Workbench 16.0. In this work, the fundamental parameters were calculated in Ansys-Workbench. It is shown, that structural modifications have great impact in the displacement and the cut-off force of the microgripper.

Citation Download Citation

Margarita Tecpoyotl-T., Pedro Vargas Ch., Svetlana Koshevaya, Ramón Cabello-R., Alejandra Ocampo-D., and J. Gerardo Vera-D. "Design and simulation of a MEM pressure microgripper based on electrothermal microactuators", Proc. SPIE 9936, Thin Films for Solar and Energy Technology VIII, 99360I (23 September 2016); https://doi.org/10.1117/12.2237533

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KEYWORDS

Microactuators

Microelectromechanical systems

Actuators

Finite element methods

Silicon

Computer simulations

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