Refractive index and birefringence studies of laser-written structures buried inside silicon

Alperen Saltik; Rana Asgari Sabet; Onur Tokel

doi:10.1117/12.2648238

17 March 2023 Refractive index and birefringence studies of laser-written structures buried inside silicon

Alperen Saltik, Rana Asgari Sabet, Onur Tokel

Proceedings Volume PC12408, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII; PC124080E (2023) https://doi.org/10.1117/12.2648238
Event: SPIE LASE, 2023, San Francisco, California, United States

Abstract

Refractive index engineering is critical for fabrication of refractive optical elements directly inside transparent materials. Such three-dimensional optical engineering is only emerging for the technologically important material, silicon. Here we show the first analysis of refractive index and birefringence observations written with a beam other than Gaussian inside Si. Exploiting a Bessel-type beam, we created laser-written structures with average refractive index as high as 6 ✕ 10-^3 and retardance on the order of 20nm. These properties are studied as function of laser modulation and other relevant parameters, including writing geometry, and compared with results of Gaussian beam written structures.

Conference Presentation

Citation Download Citation

Alperen Saltik, Rana Asgari Sabet, and Onur Tokel "Refractive index and birefringence studies of laser-written structures buried inside silicon", Proc. SPIE PC12408, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII, PC124080E (17 March 2023); https://doi.org/10.1117/12.2648238

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