Progress report on actinic patterned mask inspection for EUVL

Safak Sayan

doi:10.1117/12.3012431

26 September 2023 Progress report on actinic patterned mask inspection for EUVL

Safak Sayan

Proceedings Volume PC12915, Photomask Japan 2023: XXIX Symposium on Photomask and Next-Generation Lithography Mask Technology; PC1291504 (2023) https://doi.org/10.1117/12.3012431
Event: Photomask Japan 2023, 2023, Online Only

Abstract

This conference presentation was prepared for Photomask Japan 2023.

Conference Presentation

Citation Download Citation

Safak Sayan "Progress report on actinic patterned mask inspection for EUVL", Proc. SPIE PC12915, Photomask Japan 2023: XXIX Symposium on Photomask and Next-Generation Lithography Mask Technology, PC1291504 (26 September 2023); https://doi.org/10.1117/12.3012431

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