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Editorial

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Burn J. Lin
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.1621873
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SPECIAL SECTION ON SURFACE MICROMACHINING

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Jeffry J. Sniegowski; James H. Smith
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.1616574

SPECIAL SECTION ON MICRO-OPTICS FOR PHOTONIC NETWORKS

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Thomas J. Suleski
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.1616575

MASKLESS LITHOGRAPHY

INTEGRATED MICROFLUIDIC SYSTEMS

MICRO-OPTICAL COMPONENTS

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Seok-min Kim; Dongmook Kim; Shinill Kang
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.1611183
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