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Burn J. Lin
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.1999655

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Topics: Reflection

Special Section on Polarization and Hyper-NA Lithography

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Donis Flagello; Christopher J. Progler
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.2044807
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Konstantinos Adam; Wilhelm Maurer
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.2038687
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Andrew Estroff; Yongfa Fan; Anatoly Bourov; Bruce Smith
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.2037507
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Michael Totzeck; Paul Gräupner; Tilmann Heil; Aksel Göhnermeier; Olaf Dittmann; Daniel Krähmer; Vladimir Kamenov; Johannes Ruoff; Donis Flagello
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.2049187

Articles

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Chao Liu; Mosong Cheng
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.2037407
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Timothy A. Shedd
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.2037427
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Deng-Huei Hwang; Kan-Ping Chin; Yi-Chung Lo; Wensyang Hsu
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.2037070
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Chung-Hsien Lin; Hong-Ren Chen; Weileun Fang
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.2037387
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Mojtaba Joodaki; Günter Kompa; Hartmut Hillmer; Rainer Kassing
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.2008968
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Mark Summers; Barbara Djurfors; Michael Brett
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.2036991
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