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Editorial

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Burn J. Lin
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.2062507

Open Access Open Access

SPECIAL SECTION ON MOEMS Design, Technology, and Applications

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M. Edward Motamedi
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.2118627

Open Access Open Access

SPECIAL SECTION ON MOEMS Fiber Optics and Telecom

SPECIAL SECTION ON MOEMSFiber Optics and Telecom

SPECIAL SECTION ON MOEMS Display and Spectroscopy

SPECIAL SECTION ON MOEMSMicromirrors and Adaptive Optics

SPECIAL SECTION ON MOEMS Design, Technology, and Applications Micromirrors and Adaptive Optics

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Yuhe Shao; David L. Dickensheets
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.2107127

SPECIAL SECTION ON MOEMS Micromirrors and Adaptive Optics

SPECIAL SECTION ON MOEMS Microlithography and Processing

SPECIAL SECTION ON MOEMS Design, Technology, and Applications Microlithography and Processing

SPECIAL SECTION ON MOEMSDevice Packaging

SPECIAL SECTION ON MOEMS Device Packaging

Articles

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Alexander Straaijer
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.2140247
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Thomas Mülders; Wolfgang Henke; Klaus Elian; Christoph Nölscher; Michael Sebald
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.2136867

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