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Editorial

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Burn J. Lin
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.2188524

Open Access Open Access

Special Section on Nanopatterning

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Chien-Hung Lin; Rongshun Chen
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.2172992
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Arvind Battula; Senthil Theppakuttai; Shaochen Chen
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.2177288
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Helmut Schift; Sandro Bellini; Uwe Pieles; Jens Gobrecht
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.2172993
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Cees J. M. van Rijn
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.2173269

Articles

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Zhou Qin; Dong Ying; Dong Zhe; You Zheng
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.2167968
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Peter Dirksen; Joseph Braat; Augustus J. E. M. Janssen
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.2168449
Topics: Diffusion, Lenses
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Gregory F. Nellis; Mohamed S. El-Morsi; Chris Van Peski; Andrew Grenville
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.2167947
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