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Editorial

Special Section on Resolution Enhancement Techniques and Design for Manufacturability

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Puneet Gupta; Andrew B. Kahng; Dennis Sylvester; Jie Yang
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.2774994

Articles

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Bryan C. Bolt; Paul C. Allen
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.2777158
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Nan-Chyuan Tsai; Chung-Yang Sue; Chih-Che Lin
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.2778645
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Shanti Bhattacharya; Allyson Hartzell
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.2775458
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Changchun Hsu; Chingfu Tsou; Weileun Fang
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.2778431
Topics: Thin films
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