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Editorial

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Burn J. Lin
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.3245963

Open Access Open Access

Topics: Feedback

JM3 Letters

Special Section on Reliability, Packaging, Testing, and Characterization of MEMS and MOEMS

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Herbert R. Shea
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.3152362
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C. T. Pan; Y. J. Chen; S. C. Shen
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.3152363
Topics: Simulations

Special Section on Computational Lithography

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Donis Flagello; Chris Mack
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.3240492
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Yuri Granik
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.3158613

Articles

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Jean Montagu; Herman DeWeerd; Nathan Tyburczy; Natalia Rodionova; Peter Maimonis
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.3158071
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Wan-Chun Chuang; Yuh-Chung Hu; Chi-Yuan Lee; Wen-Pin Shih; Pei-Zen Chang
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.3158355
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Haiyong Quan; Zhixiong Guo
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.3213247
Topics: Resonators
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L. Sujatha; Vishwas S. Kale; Enakshi Bhattacharya
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.3213252

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