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Burn J. Lin
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.3511517

Open Access Open Access

Special Section on Reliability, Packaging, Testing, and Characterization of MEMS and MOEMS II

Special Section on Line-Edge Roughness

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Chris A. Mack
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.3494607
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Yongchan Ban; Savithri Sundareswaran; David Z. Pan
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.3500746
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Brittany M. McClinton; Patrick P. Naulleau
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.3497607
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Atsushi Hiraiwa; Akio Nishida
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.3504358
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Hiroshi Morita; Masao Doi
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.3530593

Special Section on Metrology

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Moshe Preil; Shaunee Cheng
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.3540417

Open Access Open Access

Topics: Metrology
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Jie Li; Justin J. Hwu; Yongdong Liu; Silvio Rabello; Zhuan Liu; Jiangtao Hu
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.3514708

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