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Editorial

JM3 Letters

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Woo-Hyuck Choi; Ian Papautsky
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.3580751

Open Access Open Access

Topics: Fabrication, Sensors

Articles

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Jason Sun; Kwong-Kit Choi; Merzy D. Jhabvala; Christine Jhabvala
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.3580755
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Ashish Mall; Amit Agrawal; Ramesh K. Singh; Suhas S. Joshi
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.3589305
Topics: Simulations, Water
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Atsushi Hiraiwa; Akio Nishida
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.3598169

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