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Special Section on Dimensional Metrology with Atomic Force Microscopy: Instruments and Applications

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J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.JMM.11.1.011001

Open Access Open Access

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Malcolm A. Lawn; Renee V. Goreham; Jan Herrmann; Åsa K. Jämting
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.JMM.11.1.011007

Open Access Open Access

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Donald A. Chernoff; David L. Burkhead
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.JMM.11.1.011008
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Vladimir Ukraintsev; Bill Banke
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.JMM.11.1.011010
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Aaron Cordes; Benjamin Bunday; Eric Cotrell
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.JMM.11.1.011011

Regular Articles

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Michael L. Rieger
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.JMM.11.1.013003
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Bidhan Pramanick; Soumen Das; Tarun K. Bhattacharyya
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.JMM.11.1.013008

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