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J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.JMM.13.1.010101

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Chris Mack
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.JMM.13.1.010102

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Chris Mack
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.JMM.13.1.010103

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Special Section on Optical Lithography Extension Beyond the 14-nm Node

Special Section on Emerging MOEMS Technology and Applications

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Ed Motamedi; Joel Kubby; Patrick Oden; Wibool Piyawattanametha
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.JMM.13.1.011101

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Mahesh Kondiparthi
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.JMM.13.1.011106
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Matthias Goy; Claudia Reinlein; Jan Kinast; Nicolas Lange
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.JMM.13.1.011107
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Yasser M. Sabry; Diaa Khalil; Bassam Saadany; Tarik Bourouina
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.JMM.13.1.011110

Special Section on Metrology and Inspection for 3-D Integrated Circuits and Interconnects

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Alexander Starikov; Yi-sha Ku
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.JMM.13.1.011201

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Victor Vartanian; Richard A. Allen; Larry Smith; Klaus Hummler; Steve Olson; Brian Sapp
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.JMM.13.1.011206
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Yi-Sha Ku
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.JMM.13.1.011209

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Regular Articles

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Yingtao Tian; Xiaobang Shang; Michael J. Lancaster
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.JMM.13.1.013002

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Ran Zhang; Jinkui Chu; Le Guan; Shuangliang Li; Jian Min
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.JMM.13.1.013007
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Yu-Chi Kang; Chien-Hung Lin; Rongshun Chen
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.JMM.13.1.013013
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Xuejia Guo; Yanqiu Li; Lisong Dong; Lihui Liu
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.JMM.13.1.013015

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Xiaoxiao Xu; Zhenyu Li; Pinaki Sarder; Nalinikanth Kotagiri; Arye Nehorai
J. Micro/Nanolith. MEMS MOEMS.   doi: 10.1117/1.JMM.13.1.013017
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Errata

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