Journal of Micro/Nanolithography, MEMS, and MOEMS

Journal of Micro/Nanolithography, MEMS, and MOEMS

The Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3) publishes papers on the science, development, and practice of lithographic, fabrication, packaging, and integration technologies necessary to address the needs of the electronics, MEMS, MOEMS, and photonics industries. The wide range of such devices includes biomedical microdevices, microfluidics, sensors and actuators, adaptive optics, and digital micromirrors. The scope is broad to facilitate synergy and interest between the communities served by the journal.

Featured Articles


Modeling ellipsometric measurement of three-dimensional structures with rigorous coupled wave analysis and finite element method simulations

Samuel O’Mullane; Nick Keller; Alain C. Diebold



Integration of a templated directed self-assembly-based hole shrink in a short loop via chain

Paulina Rincon-Delgadillo; Boon Teik Chan; Jan Doise; Marleen van der Veen; Nancy Heylen; Steven Demuynck; Juergen Boemmels; Roel Gronheid

Top Downloads from Journal of Micro/Nanolithography, MEMS, and MOEMS

Editor-in-Chief

Chris A. Mack
  • Lithoguru.com

About the Journal


Scope:

Topical areas covered include:

Lithography: tools, materials, and processes associated with the patterning of structures that have submicrometer and nanometer-scale features. Included are imaging and nonimaging approaches using optics, electron and other particle beams, nanoimprint, molecular self-assembly, and their hybrids. Applications include semiconductor fabrication, but also patterning for other micro/nanodevices.

Microelectromechanical systems (MEMS): the design, fabrication, operation, reliability, and testing of microdevices that contain both electrical and mechanical elements.

Micro-optoelectromechanical systems (MOEMS): the design, fabrication, operation, reliability, and testing of microdevices that contain electrical, mechanical, and optical elements (that is, the merging of micro-optics and MEMS).

Microfabrication: technologies to shape three-dimensional structures leading to the fabrication of active and passive electronics, photonics, MEMS, MOEMS, micro/nano-optics, and other micro/nanodevices.

Metrology: metrology and process control for the above devices and their fabrication processes.

ISSN: 1932-5150
E-ISSN: 1932-5134
Frequency: Quarterly
Indexed in:
  • Science Citation Index Expanded
  • Current Contents - Physical, Chemical & Earth Sciences
  • Current Contents - Engineering, Computing & Technology
  • Inspec
  • Scopus
  • Ei Compendex
  • Astrophysics Data System
  • Materials Science Citation Index

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