Evaluation of the multistep generated wafer alignment mark to overcome chemical mechanical polishing problems

SangMan Bae; Moon-Hee Lee

doi:10.1117/1.2168461

1 January 2006 Evaluation of the multistep generated wafer alignment mark to overcome chemical mechanical polishing problems

SangMan Bae, Moon-Hee Lee

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 5, Issue 1, 013006 (January 2006). https://doi.org/10.1117/1.2168461

Abstract

We develop a new method to improve alignment accuracy. Specially designed two-step wafer alignment marks are evaluated for laser scan alignment to enhance wafer alignment. Wafer alignment accuracy data shows that it is enough to execute wafer alignment without failures in spite of the coarse chemical mechanical polishing (CMP) process. Effective detection of a wafer alignment mark leads to enhancement of product quality and could reduce the process time of the lithography step. It is a useful technique for thick metalization films and the planarity of high topography. A coarse metrology wafer with a CMP process can degrade the wafer alignment process. We try deep trench profiles and the clear structures of modified marks using additional photomask processing.

©(2006) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

SangMan Bae and Moon-Hee Lee "Evaluation of the multistep generated wafer alignment mark to overcome chemical mechanical polishing problems," Journal of Micro/Nanolithography, MEMS, and MOEMS 5(1), 013006 (1 January 2006). https://doi.org/10.1117/1.2168461

Published: 1 January 2006

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available