Dr. Aili Ting Profile

Dr. Aili Ting

Senior Member Technical Staff at Sandia National Labs California

SPIE Involvement:

Author

Publications (7)

Proceedings Article | 22 January 2005 Paper

Paper

Temperature rise of the silicon mask-PMMA resist assembly during LIGA exposure

Aili Ting

Proceedings Volume 5715, (2005) https://doi.org/10.1117/12.590909

KEYWORDS: Polymethylmethacrylate, Silicon, Photomasks, X-rays, Absorption, Convection, Nitrogen, Temperature metrology, Gold, Interfaces

Read Abstract +

SPIE Journal Paper | 1 July 2004

Submicron resolution of secondary radiation in LIGA polymethyl-methacrylate resist exposure

Aili Ting

JM3, Vol. 3, Issue 03, (July 2004) https://doi.org/10.1117/12.10.1117/1.1759324

KEYWORDS: Photons, Electrons, Polymethylmethacrylate, Copper, Absorption, Luminescence, Aluminum, Chemical species, Interfaces, Silicon

Read Abstract +

Proceedings Article | 15 January 2003 Paper

Paper

Modeling of secondary radiation damage in LIGA PMMA resist exposure

Aili Ting

Proceedings Volume 4979, (2003) https://doi.org/10.1117/12.478237

KEYWORDS: Photons, Copper, Electrons, Polymethylmethacrylate, Absorption, Aluminum, Luminescence, Silicon, Interfaces, Metals

Read Abstract +

Proceedings Article | 30 August 1999 Paper

Paper

LIGA: metals, plastics, and ceramics

Jill Hruby, Stewart Griffiths, Linda Domeier, Alfredo Morales, Dale Boehme, Michelle Bankert, William Bonivert, John Hachman, Dawn Skala, Aili Ting

Proceedings Volume 3874, (1999) https://doi.org/10.1117/12.361216

KEYWORDS: Polymethylmethacrylate, Metals, Ceramics, Synchrotrons, Photomasks, X-rays, Polymers, Silicon, Gold, Scanners

Read Abstract +

Proceedings Article | 10 March 1999 Paper

Paper

Optimum doses and mask thickness for synchrotron exposure of PMMA resists

Stewart Griffiths, Jill Hruby, Aili Ting

Proceedings Volume 3680, (1999) https://doi.org/10.1117/12.341239

KEYWORDS: Polymethylmethacrylate, Synchrotrons, Tolerancing, Absorption, Gold, Temperature metrology, X-rays, Silicon, Information operations, Diffusion

Read Abstract +

Proceedings Article | 1 September 1998 Paper

Paper

PMMA development studies using various synchrotron sources and exposure conditions

Ming Tan, Michelle Bankert, Stewart Griffiths, Aili Ting, Dale Boehme, Shondelle Wilson, Lianna Balser

Proceedings Volume 3512, (1998) https://doi.org/10.1117/12.324068

KEYWORDS: Polymethylmethacrylate, Synchrotrons, Annealing, X-rays, X-ray sources, Photoresist processing, Temperature metrology, Polymers, Aluminum, Tolerancing

Read Abstract +

Proceedings Article | 31 August 1998 Paper

Paper

Transport limitations in electrodeposition for LIGA microdevice fabrication

Stewart Griffiths, Robert Nilson, R. Bradshaw, Aili Ting, William Bonivert, John Hachman, Jill Hruby

Proceedings Volume 3511, (1998) https://doi.org/10.1117/12.324324

KEYWORDS: Ions, Diffusion, Metals, Plating, Convection, Nickel, Hydrogen, Information operations, Solids, Electrodes

Read Abstract +

Showing 5 of 7 publications

SIGN IN TO:

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Advertisement

Advertisement