CONFERENCE PROCEEDINGS
Advanced Search
Amitha Govindaraju
at Louisiana Tech Univ
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 16 May 2005 Paper
Reinforcement of PDMS masters using silicon plates
Cheng Luo, Fang Meng, Yiyun Guo, Xinchuan Liu, Amitha Govindaraju
Proceedings Volume 5763, (2005) https://doi.org/10.1117/12.600324
KEYWORDS: Silicon, Particles, Lithography, Microfabrication, Temperature metrology, Nanolithography, Semiconducting wafers, Optical lithography, Micromachining, Liquids
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top