Dr. Andrea Firrincieli Profile

Dr. Andrea Firrincieli

at imec

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 10 April 2024 Presentation

Sustainable semiconductor processing solutions: status and guidelines

Andrea Firrincieli, Emily Gallagher, Herbert Struyf, Frank Holsteyns, Cedric Rolin, Lars-Åke Ragnarsson

Proceedings Volume PC12958, (2024) https://doi.org/10.1117/12.3012691

KEYWORDS: Sustainability, Etching, Semiconductor manufacturing, Chemical mechanical planarization, Carbon, Atomic layer deposition, Nanostructures, Deposition processes, Very large scale integration, Vacuum

Read Abstract +

Proceedings Article | 1 May 2023 Presentation + Paper

Sustainable semiconductor manufacturing: lessons for lithography and etch

Emily Gallagher, Philippe Bezard, Lizzie Boakes, Andrea Firrincieli, Cedric Rolin, Lars-Åke Ragnarsson

Proceedings Volume 12499, 124990F (2023) https://doi.org/10.1117/12.2662857

KEYWORDS: Etching, Carbon, Hydrogen, Lithography, Scanners, Semiconductors, Sustainability

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years