Dr. ChaeHo Shin Profile

Dr. ChaeHo Shin

at Korea Research Institute of Standards and Science

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Publications (1)

SPIE Journal Paper | 10 October 2014

Exact and reliable overlay metrology in nanoscale semiconductor devices using an image processing method

Jinkook Park, ChaeHo Shin, Minkook Kim, Junghwan Kim, JeongKyun Park, JungSoo Kim, ChungSam Jun, Yeny Yim, Janghee Lee

JM3, Vol. 13, Issue 04, 041409, (October 2014) https://doi.org/10.1117/12.10.1117/1.JMM.13.4.041409

KEYWORDS: Overlay metrology, Image processing, Semiconductors, Semiconducting wafers, Detection and tracking algorithms, Algorithm development, Quantization, Reliability, Image segmentation, Scanning electron microscopy

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