Mr. Chun-Chang Yu Profile

Chun-Chang Yu

at National Taiwan Univ

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Publications (2)

SPIE Journal Paper | 22 August 2018

Cost-effective and channel-scalable hardware decoders for multiple electron-beam direct-write systems

Chun-Chang Yu, Pei-Chun Lin, Yi-Chang Lu, Charlie Chung-Ping Chen

JM3, Vol. 17, Issue 03, 031202, (August 2018) https://doi.org/10.1117/12.10.1117/1.JMM.17.3.031202

KEYWORDS: Computer programming, Electron beam direct write lithography, Raster graphics, Electron beam lithography, Image compression, Logic, Detection and tracking algorithms, Semiconducting wafers, Data compression, Data processing

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SPIE Journal Paper | 22 December 2014 Open Access

Efficient three-dimensional resist profile-driven source mask optimization optical proximity correction based on Abbe-principal component analysis and Sylvester equation

Pei-Chun Lin, Chun-Chang Yu, Charlie C. Chen

JM3, Vol. 14, Issue 01, 011006, (December 2014) https://doi.org/10.1117/12.10.1117/1.JMM.14.1.011006

KEYWORDS: Diffusion, Source mask optimization, Resolution enhancement technologies, Optical proximity correction, Convolution, Photoresist materials, Principal component analysis, SRAF, Matrices, Fiber optic illuminators

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