Dr. Dănuț Argintaru Profile

Dr. Dănuț Argintaru

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Proceedings Article | 2 March 2023 Paper

Analysis and simulation of a MEMS based accelerometer used to monitor the movement of a sea waves

Valerica Baban, Dănuț Argintaru, Eliodor Constantinescu

Proceedings Volume 12493, 1249320 (2023) https://doi.org/10.1117/12.2643251

KEYWORDS: Capacitors, Capacitance, Microelectromechanical systems, Finite element methods, Silicon, Motion analysis, Sensors, Fourier transforms, Electrodes, Differential equations

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