Dr. Gert Leusink Profile

Dr. Gert Leusink

VP Technology at TEL Technology Ctr America LLC

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Publications (1)

Proceedings Article | 9 April 2018 Paper

Multi-color fly-cut-SAQP for reduced process variation

Richard Farrell, Elliott Franke, Kanda Tapily, Jodi Hotalen, David O'Meara, Angelique Raley, Akitero Ko, Peter Biolsi, Cory Wajda, Gert Leusink, Anton DeVilliers, David Hetzer

Proceedings Volume 10586, 1058611 (2018) https://doi.org/10.1117/12.2303004

KEYWORDS: Etching, Plasma etching, Chemical mechanical planarization, Optical lithography, Plasma, Lithography, Transmission electron microscopy, Silica, Polishing, Critical dimension metrology

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