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Heungdong Kwon
at Stanford Univ.
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Publications (1)
Proceedings Article | 25 May 2022 Presentation + Paper
Nanoscale phase change memory arrays patterned by block copolymer directed self-assembly
Maryann Tung, Asir Intisar Khan, Heungdong Kwon, Mehdi Asheghi, Kenneth Goodson, Eric Pop, H.-S. Philip Wong
Proceedings Volume 12054, 1205406 (2022) https://doi.org/10.1117/12.2611737
KEYWORDS: Directed self assembly, Amorphous silicon, Tin, Etching, Switching, Resistance, Scanning electron microscopy, Electrodes, Plasma, Sputter deposition
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