Mr. Hsien-Chung Lee Profile

Hsien-Chung Lee

at National Taiwan Univ

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 22 September 1993 Paper

Ruey-Shing Huang, Hsien-Chung Lee, Mark Gross, C. Horwitz

Proceedings Volume 2101, (1993) https://doi.org/10.1117/12.156490

KEYWORDS: Sensors, Oxides, Etching, Chromium, Scanning electron microscopy, Intelligent sensors, Silicon, Reactive ion etching, Aluminum, Electrodes

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Keywords/Phrases