Dr. Jaehwa Jeong Profile

Dr. Jaehwa Jeong

at Korea Univ

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Publications (1)

SPIE Journal Paper | 20 September 2012

Design, fabrication, and experimental demonstration of a piezoelectric cantilever for a low resonant frequency microelectromechanical system vibration energy harvester

Moonkeun Kim, Beomseok Hwang, Yong-Hyun Ham, Jaehwa Jeong, Nam-Ki Min, Kwang-Ho Kwon

JM3, Vol. 11, Issue 3, 033009, (September 2012) https://doi.org/10.1117/12.10.1117/1.JMM.11.3.033009

KEYWORDS: Microelectromechanical systems, Silicon, Ferroelectric materials, Etching, Resistance, Finite element methods, Optical simulations, Wind energy, Platinum, Deep reactive ion etching

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