Ms. Karen Huang Profile

Karen Huang

at JSR Micro Inc

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Author

Publications (2)

Proceedings Article | 27 March 2014 Paper

Anti-spacer double patterning

Michael Hyatt, Karen Huang, Anton DeVilliers, Mark Slezak, Zhi Liu

Proceedings Volume 9051, 905118 (2014) https://doi.org/10.1117/12.2045617

KEYWORDS: Double patterning technology, Line width roughness, Optical lithography, Photoresist processing, Coating, Semiconducting wafers, Etching, Lithography, Photoresist materials, Plasma

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Proceedings Article | 19 March 2012 Paper

Design, synthesis, and characterization of KrF negative developable bottom anti-reflective coating materials

Sen Liu, Kuang-Jung Chen, Wu-Song Huang, Steven Holmes, Karen Huang, Nicolette Fender, Ranee Kwong, Brian Osborn, Cherry Tang, Chung-Hsi Wu, Mark Slezak

Proceedings Volume 8325, 83251B (2012) https://doi.org/10.1117/12.916158

KEYWORDS: Polymers, Reflectivity, Silicon, Semiconducting wafers, Bottom antireflective coatings, Lithography, Chromophores, Critical dimension metrology, Silicon films, Solids

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