Dr. Makoto Satake Profile

Dr. Makoto Satake

Senior Research Engineer at Hitachi High-Tech America Inc

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Publications (3)

Proceedings Article | 22 February 2021 Presentation + Paper

Etch developments in response to DSA challenges

J. Laib, L. Reyes, A. Turnquist, M. Satake, N. Kofuji

Proceedings Volume 11610, 116100O (2021) https://doi.org/10.1117/12.2584944

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SPIE Journal Paper | 8 November 2013 Open Access

Effect of oxygen addition to an argon plasma on etching selectivity of poly(methyl methacrylate) to polystyrene

Makoto Satake, Taku Iwase, Masaru Kurihara, Nobuyuki Negishi, Yasuhiko Tada, Hiroshi Yoshida

JM3, Vol. 12, Issue 04, 041309, (November 2013) https://doi.org/10.1117/12.10.1117/1.JMM.12.4.041309

KEYWORDS: Etching, Plasma, Oxygen, Argon, Polymethylmethacrylate, Plasma etching, Ions, Picosecond phenomena, Polymers, Directed self assembly

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Proceedings Article | 29 March 2013 Paper

Characteristics of selective PMMA etching for forming a PS mask

M. Satake, T. Iwase, M. Kurihara, N. Negishi, Y. Tada, H. Yoshida

Proceedings Volume 8685, 86850T (2013) https://doi.org/10.1117/12.2011071

KEYWORDS: Etching, Polymethylmethacrylate, Plasma, Oxygen, Argon, Plasma etching, Picosecond phenomena, Ultraviolet radiation, Ions, Directed self assembly

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