Prof. Miroslav Vlcek Profile

Prof. Miroslav Vlcek

Professor, Faculty of Chemical Technology at Univ Pardubice

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Author

Publications (11)

SPIE Journal Paper | 1 October 2009

Chalcogenide glass e-beam and photoresists for ultrathin grayscale patterning

Andriy Kovalskyy, Jiri Cech, Miroslav Vlcek, Christopher Waits, Madan Dubey, William Heffner, Himanshu Jain

JM3, Vol. 8, Issue 04, 043012, (October 2009) https://doi.org/10.1117/12.10.1117/1.3273966

KEYWORDS: Etching, Thin films, Photoresist materials, Silicon, Fresnel lenses, Reactive ion etching, Chalcogenide glass, Arsenic, Photomasks, Silver

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Proceedings Article | 1 April 2009 Paper

Chalcogenide glass thin film resists for grayscale lithography

A. Kovalskiy, J. Cech, C. Tan, W. Heffner, E. Miller, C. Waits, M. Dubey, W. Churaman, M. Vlcek, H. Jain

Proceedings Volume 7273, 72734A (2009) https://doi.org/10.1117/12.811646

KEYWORDS: Thin films, Etching, Silicon, Fresnel lenses, Silver, Photoresist materials, Photomasks, Polymers, Grayscale lithography, Glasses

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Proceedings Article | 1 April 2003 Paper

Photostructural transformations in amorphous Ge-S thin films: a photoluminescence study

N. Bondar, N. Davydova, V. Tishchenko, Miroslav Vlcek

Proceedings Volume 5024, (2003) https://doi.org/10.1117/12.497289

KEYWORDS: Chemical species, Electrons, Luminescence, Thin films, Raman spectroscopy, Chalcogenide glass, Germanium, Chalcogenides, Glasses, Molecules

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Proceedings Article | 1 April 2003 Paper

Photosensitive properties of As-S layers

Alexander Stronski, Miroslav Vlcek, A. Sklenar, Sergey Kostyukevich

Proceedings Volume 5024, (2003) https://doi.org/10.1117/12.497287

KEYWORDS: Raman spectroscopy, Glasses, Annealing, Chemical species, Dielectrics, Etching, Diffraction gratings, Thermal modeling, Holography, Arsenic

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Proceedings Article | 5 February 2002 Paper

Holographic applications of As-S-Se inorganic resist

Sergey Kostyukevych, Miroslav Vlcek, Nadya Moskalenko, Peter Shepeliavii, Alexander Stronski, Sergey Svechnikov, Evgenie Venger

Proceedings Volume 4607, (2002) https://doi.org/10.1117/12.455188

KEYWORDS: Holography, Etching, Optical components, Raman spectroscopy, Diffraction, Glasses, Diffraction gratings, Holograms, Chemical elements, Holography applications

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Proceedings Article | 24 September 1998 Paper

Photoimaging properties and imaging technology based on As40Se60 thin layers

Miroslav Vlcek, Alexander Stronski, A. Sklenar, Sergey Kostyukevych, Peter Romanenko

Proceedings Volume 3450, (1998) https://doi.org/10.1117/12.323408

KEYWORDS: Holography, Diffraction gratings, Diffractive optical elements, Etching, Annealing, Argon ion lasers, Raman spectroscopy, Helium neon lasers, Selenium, Imaging technologies

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Proceedings Article | 19 August 1998 Paper

Imaging technology based on As38S62 thin layers

Alexander Stronski, Miroslav Vlcek, A. Sklenar

Proceedings Volume 3573, (1998) https://doi.org/10.1117/12.324551

KEYWORDS: Annealing, Raman spectroscopy, Thin films, Etching, Imaging technologies, Transmittance, Holography, Glasses, Refractive index, Dielectrics

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Proceedings Article | 20 April 1998 Paper

Optical characterization of As40S40Se20 inorganic resist

Alexander Stronski, Miroslav Vlcek, Peter Shepeljavi, Apollinary Stetsun

Proceedings Volume 3359, (1998) https://doi.org/10.1117/12.306248

KEYWORDS: Thin films, Etching, Raman spectroscopy, Quartz, Glasses, Transparency, Transmittance, Spectrophotometry, Annealing, Selenium

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Proceedings Article | 20 April 1998 Paper

Photostructural transformations in amorphous Ge-S thin films: a light-scattering study

N. Bondar, N. Davydova, V. Tishchenko, Miroslav Vlcek

Proceedings Volume 3359, (1998) https://doi.org/10.1117/12.306242

KEYWORDS: Raman spectroscopy, Chemical species, Chalcogenides, Thin films, Laser irradiation, Glasses, Crystals, Refractive index, Holography, Sulfur

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Proceedings Article | 26 March 1998 Paper

Image formation properties of As40S20Se40 thin layers

Alexander Stronski, Miroslav Vlcek, A. Sklenar, Peter Shepeljavi, Pavel Oleksenko, Tomas Wagner

Proceedings Volume 3294, (1998) https://doi.org/10.1117/12.304529

KEYWORDS: Image acquisition, Thin films, Statistical analysis, Transmittance, Annealing, Raman spectroscopy, Glasses, Refractive index, Etching, Holography

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Proceedings Article | 19 August 1996 Paper

Kinetics and Rutherford backscattering study of the photo-induced solid state chemical reaction between silver and amorphous As33S67 layers

Tomas Wagner, Miroslav Vlcek, Miloslav Frumar, Vratislav Perina, Eero Rauhala, Jaakko Saarilahti, Peter Ewen

Proceedings Volume 2776, (1996) https://doi.org/10.1117/12.246830

KEYWORDS: Silver, Diffusion, Backscatter, Ion beams, Chalcogenides, Chemical reactions, Glasses, Particles, Spectroscopy, Ions

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Showing 5 of 11 publications

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