Mr. Naoki Ueda Profile

Naoki Ueda

at Osaka Metropolitan Univ

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Publications (2)

Proceedings Article | 28 July 2014 Paper

Built-in lens mask lithography: challenge for high definition lens-less lithography

Naoki Ueda, Masaru Sasago, Akio Misaka, Hisao Kikuta, Hiroaki Kawata, Yoshihiko Hirai

Proceedings Volume 9256, 92560A (2014) https://doi.org/10.1117/12.2065251

KEYWORDS: Photomasks, Lithography, Transmittance, Resolution enhancement technologies, Binary data, Geometrical optics, Numerical simulations, Light wave propagation, Collimation, Phase shifts

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Proceedings Article | 31 March 2014 Paper

Built-in lens mask lithography

Naoki Ueda, Masaru Sasago, Akio Misaka, Hisao Kikuta, Hiroaki Kawata, Yoshihiko Hirai

Proceedings Volume 9052, 90520I (2014) https://doi.org/10.1117/12.2046060

KEYWORDS: Photomasks, Lithography, Transmittance, Resolution enhancement technologies, Binary data, Geometrical optics, Optical lithography, Phase shifts, Light wave propagation, Collimation

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