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Pavel S. Shlepakov
at Valiev IPT RAS, Yaroslavl Branch
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Publications (1)
Proceedings Article | 31 January 2022 Paper
FEM simulation of AlN-based MEMS energy harvester
Pavel Shlepakov, Ilia Uvarov
Proceedings Volume 12157, 121570N (2022) https://doi.org/10.1117/12.2624607
KEYWORDS: Energy harvesting, Modeling and simulation, Aluminum nitride, Finite element methods, Microelectromechanical systems, Transducers, Piezoelectric effects, Physics
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