Mr. Seshadri Rampoori Profile

Seshadri Rampoori

at Siemens EDA

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Publications (2)

Proceedings Article | 1 December 2022 Presentation + Paper

Benefits of SEM field-of-view contour averaging for contour-based MPC modeling

Kushlendra Mishra, Rachit Sharma, Ingo Bork, Zhiheng (Mary) Zuo, Mark Pereira, Samir Bhamidipati, Seshadri Rampoori

Proceedings Volume 12293, 122930H (2022) https://doi.org/10.1117/12.2641833

KEYWORDS: Calibration, Scanning electron microscopy, Photomasks, Statistical modeling, Signal to noise ratio, Metrology, Image quality, Data modeling, Critical dimension metrology

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Proceedings Article | 22 February 2021 Presentation + Paper

Contour-based process characterization, modeling, and control for semiconductor manufacturing

Kan Zhou, Xin Guo, Wenzhan Zhou, Qijian Wan, Chunshan Du, Wenming Wu, Ao Chen, Recoo Zhang, Germain Fenger, Seshadri Rampoori, Bhamidipati Samir

Proceedings Volume 11611, 1161113 (2021) https://doi.org/10.1117/12.2591300

KEYWORDS: Process modeling, Semiconductor manufacturing, Control systems, Statistical analysis, Scanning electron microscopy, Process control, Calibration

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