Mr. Sang Hyun Han Profile

Sang Hyun Han

at Pohang Univ of Science and Technology

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Publications (1)

SPIE Journal Paper | 1 April 2011

Measurement of critical dimension in scanning electron microscope mask images

Wonsuk Lee, Sang Hyun Han, Hong Jeong

JM3, Vol. 10, Issue 02, 023003, (April 2011) https://doi.org/10.1117/12.10.1117/1.3574771

KEYWORDS: Scanning electron microscopy, Image filtering, Critical dimension metrology, Nonlinear filtering, Electron microscopes, Image processing, Speckle, Photomasks, Digital filtering, Anisotropic filtering

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