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See-Ho Tsang
at Simon Fraser Univ
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Author
Publications (1)
SPIE Journal Paper | 1 April 2008
Exposure and development of thick polydimethylglutarimide films for MEMS applications using 254-nm irradiation
Ian Foulds, Robert Johnstone, See-Ho Tsang, M. Pallapa
JM3, Vol. 7, Issue 02, 023003, (April 2008) https://doi.org/10.1117/12.10.1117/1.2909468
KEYWORDS: Deep ultraviolet, Data modeling, Semiconducting wafers, Microelectromechanical systems, Absorbance, Absorption, Polymers, Etching, Standards development, Wafer-level optics
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