Dr. Takeshi Higuchi Profile

Dr. Takeshi Higuchi

at KIOXIA Holdings Corp

SPIE Involvement:

Author

Publications (1)

SPIE Journal Paper | 24 January 2022

Advanced underlayer film to enhance the productivity of nanoimprint lithography

Kasumi Okabe, Takeshi Higuchi, Motofumi Komori, Takuya Kono

JM3, Vol. 21, Issue 01, 011006, (January 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.1.011006

KEYWORDS: Nanoimprint lithography, Gases, Semiconducting wafers, Polymers, Helium, Diffusion, Photomasks, Photoresist processing, Hydrogen, Extreme ultraviolet lithography

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years