Mr. Ünsal Sökmen Profile

Ünsal Sökmen

Ph.D. Student at Technische Univ Braunschweig

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Publications (3)

Proceedings Article | 19 May 2009 Paper

ICP cryogenic dry etching for shallow and deep etching in silicon

Ü. Sökmen, M. Balke, A. Stranz, S. Fündling, E. Peiner, H.-H. Wehmann, A. Waag

Proceedings Volume 7362, 736213 (2009) https://doi.org/10.1117/12.820917

KEYWORDS: Silicon, Etching, Dry etching, Plasma, Thermoelectric materials, Silicon films, Photoresist materials, Cryogenics, Thin films, Oxides

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Proceedings Article | 19 May 2009 Paper

Characterization and simulation of high-quality AlN-actuated resonant suspended beams

J. Hernando, J. Sánchez-Rojas, A. Ababneh, H. Seidel, Ü. Sökmen, E. Peiner, U. Schmid

Proceedings Volume 7362, 73620K (2009) https://doi.org/10.1117/12.821636

KEYWORDS: Electrodes, Aluminum nitride, Finite element methods, Bridges, Silicon, Etching, Resonators, Aluminum, Thin films, Doppler effect

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Proceedings Article | 19 May 2009 Paper

Comparison between AlN thin films with different crystal orientations for MEMS applications

A. Ababneh, G. Marchand, H. Seidel, J. Hernando, J. Sánchez-Rojas, Ü. Sökmen, E. Peiner, U. Schmid

Proceedings Volume 7362, 73621N (2009) https://doi.org/10.1117/12.821858

KEYWORDS: Aluminum nitride, Thin films, Silicon, Aluminum, Electrodes, Sputter deposition, Etching, Microelectromechanical systems, Crystals, Piezoelectric effects

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