Mr. Vladimir N. Khomutov Profile

Vladimir N. Khomutov

at IA&E SB RAS

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Author

Publications (7)

Proceedings Article | 9 October 2021 Poster + Paper

Development of methods for the formation and control of a given distribution of the photoresist thickness for conformal correctors fabrication

Victor Korolkov, Ruslan Nasyrov, Vladimir Khomutov, Dmitry Belousov, Roman Kutz

Proceedings Volume 11895, 118951J (2021) https://doi.org/10.1117/12.2604808

KEYWORDS: Photoresist materials, Optical components, Spectroscopy, Diffraction, Reflectance spectroscopy, Reflectometry, Profilometers, High power lasers, Etching

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Proceedings Article | 14 September 2021 Poster + Paper

Principles of operation and prospects for the development of laser lithographic systems for the synthesis of optical elements

V. N. Khomutov, R. V. Shimansky, R. Nasyrov, V. Korolkov

Proceedings Volume 11875, 118750O (2021) https://doi.org/10.1117/12.2597050

KEYWORDS: Control systems, Laser development, Laser systems engineering, Lithography, System on a chip, Optical scanning systems

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Proceedings Article | 10 October 2020 Poster + Paper

Determination of linewidth for metal/oxide gratings by measured diffraction efficiency in several orders

Dmitrij Belousov, Victor Korolkov, Ruslan Shimansky, Vladimir Khomutov, Roman Kuts

Proceedings Volume 11551, 115511N (2020) https://doi.org/10.1117/12.2574002

KEYWORDS: Diffraction gratings, Diffraction, Multiphoton lithography, Metals, Diffractive optical elements, Algorithm development, Thin film manufacturing, Thin films, Optics manufacturing, Oxidation

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Proceedings Article | 18 November 2019 Paper

Angular coordinate error testing of circular writing laser system using Fizeau interferometer

Vladimir Khomutov, Ruslan Nasyrov

Proceedings Volume 11188, 111881T (2019) https://doi.org/10.1117/12.2537299

KEYWORDS: Laser systems engineering, Fizeau interferometers, Diffractive optical elements, Optical fabrication equipment, Laser interferometry, Optical components, Wavefront distortions, Wavefronts, Error analysis, Optical fabrication

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Proceedings Article | 23 April 2019 Paper

Multi-channel scanning measuring system for testing of diffractive structures and thin transparent films

Victor Korolkov, Vadim Cherkashin, Vladimir Khomutov, Dmitrij Belousov

Proceedings Volume 11030, 110301E (2019) https://doi.org/10.1117/12.2521140

KEYWORDS: Diffraction, Photomasks, Diffractive optical elements, Attenuators, Optical components

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Proceedings Article | 23 April 2019 Presentation + Paper

Increasing the spatial resolution of direct laser writing of diffractive structures on thin films of titanium group metals

Victor Korolkov, Andrey Sedukhin, Dmitry Belousov, Ruslan Shimansky, Vladimir Khomutov, Sergey Mikerin, Evgeny Spesivtsev, Roman Kutz

Proceedings Volume 11030, 110300A (2019) https://doi.org/10.1117/12.2520978

KEYWORDS: Metals, Titanium, Zirconium, Thin films, Oxidation, Multiphoton lithography, Reflection, Spatial resolution, Refractive index, Laser systems engineering

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Proceedings Article | 23 April 2019 Paper

Laser beam diffraction inspection of periodic metal/oxide structures with submicron period

Dmitrij Belousov, Victor Korolkov, Vladimir Khomutov, Ruslan Nasyrov

Proceedings Volume 11030, 110301C (2019) https://doi.org/10.1117/12.2520960

KEYWORDS: Diffraction, Diffraction gratings, Diffractive optical elements, Metals, Inspection

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Showing 5 of 7 publications

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